Photoresist Thickness Measurement
Measurement Solution: Optical Thickness Gauge
Application : Online thickness uniformity measurement for photoresist layers.
Measurement Solution:Optical Thickness Gauge
Measurement Modes:
Contact measurement
Non-contact measurement
Reechi Thickness Gauge – Industry Applications:Photovoltaic 、Polymer thin films、Semiconductor (silicon, monocrystalline silicon, polycrystalline silicon)、LCD/LED display panels、Automotive glass、Optical coatings、Polymer coatings、Solar battery thin films
Technical Specifications:
| Product Model | Optical Film Thickness Gauge | ||||
|---|---|---|---|---|---|
| Product Code | RQ-01 | RQ-02 | RQ-03 | RQ-04 | |
| Measurement Type | Thin Film Type | Standard Type | Standard Type-II | Silicon-specific Type | |
| Wavelength Range | 190–1100 nm | 350–1020 nm | 380–960 nm | 950–1100 nm | |
| Measurable Thickness | (n = 1.5) | 1 nm–50 μm | 10 nm–80 μm | 500 nm–260 μm | 10 μm–1400 μm |
| (n = 3.5)/Si | — | — | 1μm - 75μm | 5μm - 600μm | |
| Accuracy | 0.2% or 1 nm (whichever is larger) | 0.2% or 2 nm | 0.4% or 5 nm | ||
| Repeatability | 0.1 nm | 0.2 nm | 1 nm | ||
| Measurement Layers | Single & multiple layers | Single layer | Single layer | ||
| Resolution | 0.1 nm (minimum display resolution) | ||||
| Measurement Mode | Reflectometry | ||||
| Incidence Angle | 90° | ||||
| Test Materials | Transparent or semi-transparent thin film materials | ||||
| Measurement Time | 100 ms/point (max frequency 300 Hz) | ||||
| Working Distance | 10–50 mm (distance from objective lens to sample surface) | ||||
| Field of View | 25 μm–1 mm (dependent on objective lens used) | ||||
| Online Measurement | Yes (supports multi-channel measurement) | ||||
Customized Measurement Solutions
